Electrode assembly useful in confined plasma assisted chemical etching,申请号IL19940110213-传众专利搜索

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发明名称	Electrode assembly useful in confined plasma assisted chemical etching
摘要
申请公布号	IL110213(D0)	申请公布日期	1994.10.21
申请号	IL19940110213	申请日期	1994.07.04
申请人	HUGHES AIRCRAFT COMPANY	发明人
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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