| 摘要 |
<p>PURPOSE:To provide an array substrate for a liquid crystal display device which has an excellent adhesion property between gate electrodes, wirings and glass substrates and does not leave etching residues. CONSTITUTION:A molybdenum/tantalum alloy film 21, a molybdenum film 22, an aluminum film 23 and a molybdenum/tantalum alloy film 24 are laminated and formed on the glass substrate 1 to form the gate electrodes and wirings 4 of a four-layered structure. Since the contact parts of the gate electrodes and wirings 4 and the glass substrate 1 are provided with the molybdenum/ tantalum alloy film 21, the adhesive property between the gate electrodes, wiring 4 and the glass substrate 1 is improved. Since the molybdenum film 22 is formed between the molybdenum/tantalum alloy film 21 and the aluminum film 23, the simultaneous etching of the molybdenum film 22 with the aluminum film 23 is possible and the etching residues are not produced. The aluminum film 23 is coated and enclosed with the molybdenum/tantalum alloy film 21, the gate electrodes and wirings 4 having low resistance and excellent chemical resistance are obtd.</p> |
