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发明名称
CLEANING EQUIPMENT
摘要
申请公布号
JPH06295896(A)
申请公布日期
1994.10.21
申请号
JP19930105037
申请日期
1993.04.07
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
HAMAMURA NAOHIKO
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
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代理人
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