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发明名称
TRAPEZOIDAL PATTERN WRITING METHOD
摘要
申请公布号
JPH06295857(A)
申请公布日期
1994.10.21
申请号
JP19930080575
申请日期
1993.04.07
申请人
JEOL LTD
发明人
WAKIMOTO OSAMU
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
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