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发明名称
PRODUCTION OF STRONTIUM-TITANIUM OXIDE THIN FILM
摘要
申请公布号
JPH06293955(A)
申请公布日期
1994.10.21
申请号
JP19930079716
申请日期
1993.04.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SHIBUYA MUNEHIRO;KITAGAWA MASATOSHI;KAMATA TAKESHI;HIRAO TAKASHI
分类号
C23C14/08;C23C14/44;(IPC1-7):C23C14/08
主分类号
C23C14/08
代理机构
代理人
主权项
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