发明名称 LEAD INSPECTION METHOD FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To provide a method for inspecting the profile of a lead led out from the peripheral part of mold resin highly accurately without taking out the semiconductor device from a tray. CONSTITUTION:An optical camera 3 for picking up the image of a lead is disposed in a region on the outside of an imaginary border L1 passing through the upper bent part 2b and the end part 2c of the lead while directing from the mold resin 1 side toward the lead 2. Arranging pitch and waving of the end of lead are detected based on the image of lead picked up by means of the optical camera 3.
申请公布号 JPH06294622(A) 申请公布日期 1994.10.21
申请号 JP19930106259 申请日期 1993.04.07
申请人 SONY CORP 发明人 YAMAUCHI KIYOSHI
分类号 G01B11/24;G01B11/245;G06T1/00;H01L21/66;H01L23/50 主分类号 G01B11/24
代理机构 代理人
主权项
地址