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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06295959(A)
申请公布日期
1994.10.21
申请号
JP19930080646
申请日期
1993.04.07
申请人
KAWASAKI STEEL CORP
发明人
ICHINOSE SHUJI
分类号
H01L21/3205;H01L21/768;(IPC1-7):H01L21/90;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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