SURFACE INSPECTION EQUIPMENT FOR WAFER,申请号JP19930084446-传众专利搜索

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发明名称	SURFACE INSPECTION EQUIPMENT FOR WAFER
摘要
申请公布号	JPH06294752(A)	申请公布日期	1994.10.21
申请号	JP19930084446	申请日期	1993.04.12
申请人	TOSHIBA CORP	发明人	YAMAGUCHI HIROSHI
分类号	G01B11/30;G01N21/88;G01N21/956;(IPC1-7):G01N21/88	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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