发明名称 PHOTOSENSITIVE COMPOSITION AND PATTERN PRODUCING METHOD
摘要 PURPOSE:To provide a photosensitive compsn. having high resolution, excellent in fine image pattern forming ability and useful as a positive photoresist, a printing material, etc., and to provide a pattern producing method using the photosensitive compsn. CONSTITUTION:This photosensitive compsn. contains a polymer having carboxyl groups as essential groups, a compd. having two or more vinyl ether groups in one molecule and a compd. which generates an acid when irradiated with active energy beams as essential components.
申请公布号 JPH06295064(A) 申请公布日期 1994.10.21
申请号 JP19930105905 申请日期 1993.04.09
申请人 KANSAI PAINT CO LTD 发明人 IMAI GENJI;IWAZAWA NAOZUMI;YAMAOKA TSUGIO
分类号 G03F7/039;G03F7/028;G03F7/033;G03F7/26;H01L21/027;H01L21/30;H05K3/00;(IPC1-7):G03F7/039 主分类号 G03F7/039
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