| 摘要 |
The objective, in the case of a transport device for magazines for holding disk-shaped objects is to guarantee a temporally efficient gas exchange within a SMIF box over the required extent, with low technical complexity, which exchange fits into the working regime connected with a SMIF system. According to the invention, a gas supply channel leads, from channels which are incorporated in the wall of the SMIF box and end on a depositing surface in self-closing valves, into gas-distribution openings which are directed essentially into spaces between the disk-shaped objects and neighbouring the bottom and top surfaces of the magazine. A gas discharge channel is connected to gas-discharge openings which, opposite the magazine, are adjacent to the gas-distribution openings. When the magazine holder is deposited, the valves are opened by tubular parts which project, facing the depositing surface, from a support plate for the SMIF box. The invention is preferably usable in the production of semiconductor chips. <IMAGE>
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