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发明名称
VERFAHREN UND VORRICHTUNG ZUR KONTAKTLOSEN MESSUNG ELEKTRISCHER SPANNUNGEN IN EINEM MESSOBJEKT MIT EINER ISOLATOROBERFLÄCHE.
摘要
申请公布号
DE59200508(D1)
申请公布日期
1994.10.20
申请号
DE19925000508
申请日期
1992.01.10
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV, 80636 MUENCHEN, DE
发明人
LACKMANN, RAINER, D-40239 DUESSELDORF, DE;WEICHERT, GERHARD, D-44388 DORTMUND, DE
分类号
G01R19/00;G01R31/302;G01R31/305;H01J37/244;H01J37/28;H01L21/66;(IPC1-7):G01R19/00
主分类号
G01R19/00
代理机构
代理人
主权项
地址
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