| 摘要 |
PURPOSE:To enable positioning to a mask tool to be made easily and prevent positional deviation of an electrode pattern by forming one-piece electrode and a positioning pattern on a first surface and plurality of divided electrode patterns on an opposing second surface. CONSTITUTION:A one-piece electrode pattern 102 and a positioning pattern 103 are formed on a first surface. Then, a plurality of divided electrode patterns 501 and 502 are formed on an opposing second surface in reference to a positioning pattern 103 formed on the first surface and electrode patterns for conduction 202 and 203 are formed on the second surface in reference to the positioning pattern 103 formed on the first surface after performing divided electrode treatment. Thus, it becomes easier to performing positioning of piezoelectric elements 101 and 201 to a mask tool when the electrode patterns 102, 103, 202, 203, 502, and 503 are formed and positional deviation of each electrode pattern 501 and 502 formed on the second surface can be prevented. |
