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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR940009996(B1)
申请公布日期
1994.10.19
申请号
KR19900016768
申请日期
1990.10.20
申请人
TOSHIBA CO., LTD.
发明人
TSUJI, HITOSHI
分类号
H01L21/3213;H01L21/027;H01L21/285;H01L21/311;H01L21/335;H01L21/338;(IPC1-7):H01L21/268
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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