| 发明名称 |
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| 摘要 |
Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element. |
| 申请公布号 |
JPH0682625(B2) |
申请公布日期 |
1994.10.19 |
| 申请号 |
JP19860119422 |
申请日期 |
1986.05.26 |
| 申请人 |
SHIIMENSU SOORAA IND LP |
发明人 |
PANSAMU ESU BIJAYAKUMAA;KINBARII EI BUREEKAA;ROBAATO DEII WAITEINGU;BUUN UON;AABINDO TEII HARAANI |
| 分类号 |
C23C16/50;C23C16/40;H01L21/205;H01L31/0296;H01L31/04;H01L31/18 |
主分类号 |
C23C16/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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