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发明名称
摘要
申请公布号
JPH0682826(B2)
申请公布日期
1994.10.19
申请号
JP19860164186
申请日期
1986.07.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAMYAMA TOMOTSUGU;ISODA SATORU;OGURA AKYOSHI
分类号
H01L51/05;H01L27/28;H01L51/30;(IPC1-7):H01L29/28
主分类号
H01L51/05
代理机构
代理人
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