发明名称 METHOD OF PULLING SINGLE CRYSTALS
摘要 In a method for pulling a single crystal, employing a double crucible assembly (6), the dopent concentration of the molten raw material in an inner crucible (11) prior to the pulling, is raised to a value higher than the dopant concentration C of the molten raw material in the inner crucible (11) at the steady state. Furthermore, at the initial stage of the pulling, the raw material having a dopant content ration of no greater than kC is introduced into the outer crucible (10) at a rate greater than the rate of decrease of the molten raw material within the inner crucible (11) during the pulling, to achieve a concentration ratio of dopant between the inner and outer crucibles (11, 10) at a target value. Subsequently, the raw material having kC as the dopant content ratio is introduced into the outer crucible (10), at a rate equal to the rate of decrease of the motlen raw material during the pulling.
申请公布号 KR940009938(B1) 申请公布日期 1994.10.19
申请号 KR19890010960 申请日期 1989.08.01
申请人 MITSUBISHI MATERIALS CORP. 发明人 ONO, NAOKI;KIDA, MICHIO;ARAI, YOSHIAKI;SAHIRA, KENSHO
分类号 C30B15/04;C30B15/12;(IPC1-7):C30B15/04;C30B29/06 主分类号 C30B15/04
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