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发明名称
FABRICATION OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH06291128(A)
申请公布日期
1994.10.18
申请号
JP19930079928
申请日期
1993.04.07
申请人
OKI ELECTRIC IND CO LTD
发明人
SHINOSAWA MASAHIKO
分类号
H01L29/73;H01L21/331;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
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地址
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