| 摘要 |
PURPOSE:To provide an acceleration sensor having a high detecting accuracy by suppressing warpage deformation of a sensor chip due to a temperature change in a capacity type acceleration sensor to be used for safety control such as a vehicle body control, etc., of an automobile. CONSTITUTION:A capacity type acceleration sensor comprises a movable electrode forming layer 8 for supporting a movable electrode 3 by a beam 2, two stationary electrode forming layers 7 having stationary electrodes 4 on surfaces, a sensor chip 1 having the electrode 3 and the electrodes 4 opposed by interposing to hold the layer 8 between the layers 7, a fixing layer 9 for fixing the chip to a board 10, and means for controlling the area of the fixing part of the layer a such as a protrusion 11. |
