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发明名称
MANUFACTURING FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06291191(A)
申请公布日期
1994.10.18
申请号
JP19930075923
申请日期
1993.04.01
申请人
NEC CORP
发明人
MIKAGI IKU
分类号
C25D3/48;H01L21/268;H01L21/28;H01L21/288;H01L21/768;(IPC1-7):H01L21/90
主分类号
C25D3/48
代理机构
代理人
主权项
地址
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