| 摘要 |
PURPOSE:To form a wiring part and an electrode by using polysilane for a conductive layer, by applying ultraviolet ray through a patterning mask and by forming an insulating layer of a part whereto ultraviolet ray is applied. CONSTITUTION:Polysilane such as methylphenylpolysilane is applied uniformly to an insulating layer 12 formed on a surface of a substrate 11. Then, ultraviolet ray is applied thereto through a mask 14 wherein a pattern of wiring is printed. On application of ultraviolet ray, a part of polysilane whereto ultraviolet ray is applied loses conductivity and becomes an insulating layer 15. A part whereto the ray is not applied becomes a polysilane conductive layer 16 holding conductivity as it is. A desired wiring pattern can be formed on the substrate 11 with an excellent producibility. Thereby, it is possible to form the simple conductive layer 16 at a low cost. |
