发明名称 Apparatus and method for automatically adjusting power output of an ultrasonic generator
摘要 Apparatus and a method for controlling the power output of an ultrasonic generator to a transducer includes a variable impedance network circuit which is interposed between the generator and the transducer. Sensing circuits and a microprocessor are coupled to the input of the transducer so that the total impedance ZT, the transducer impedance in free air ZFA and the load impedance ZL may be calculated and the network impedance ZNW may be set for a bonding operation to maintain the power level PL or the impedance ZL at a desired predetermined level.
申请公布号 US5357423(A) 申请公布日期 1994.10.18
申请号 US19930020367 申请日期 1993.02.22
申请人 KULICKE AND SOFFA INVESTMENTS, INC. 发明人 WEAVER, JAMES M.;SOWERS, MICHAEL J.
分类号 B06B1/02;B23K20/10;H01L21/00;H01L21/60;H01L21/607;(IPC1-7):G05B13/02 主分类号 B06B1/02
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