摘要 |
PURPOSE:To provide a photovoltaic device which can reduce an interface level in interface between different kinds of substances and can improve photoelectric conversion efficiency. CONSTITUTION:A photovoltaic device in which a thin film of intrinsic amorphous silicon 2 is interposed between a p-type amorphous silicon film 3 and an n-type single crystal silicon substrate 1 which are of opposite conductivity type to each other, wherein the intrinsic amorphous silicon 2 contains fluorine (F) and the content of fluorine is made less on the side of an interface of the p-type amorphous silicon 3 than on the side of an interface of the n-type single crystal silicon substrate 1. |