发明名称 |
Isolation valve for single crystal pulling apparatus |
摘要 |
An isolation valve for a single crystal pulling apparatus providing a good sealing performance is disclosed. The apparatus comprises a casing having two opposite valve seats, a first valve seat having a first opening communicable with the main chamber of the apparatus, a second valve seat having a second opening communicable with the pull chamber of the apparatus. The body of the isolation valve includes a first plate movable in and out of contact with the first valve seat to open and shut the first opening, a second plate movable in and out of contact with the second valve seat to open and shut the second opening, and a bellows connecting the first and second plates. The isolation valve also comprises a holder holding the first plate out of contact with the first valve seat when the first plate is opposite to the first valve seat, a passage communicable with a fluid supply and the interior of the valve body, and a controller controlling the pressure of a working fluid supplied from the fluid supply into the interior of the valve body. The controller has a first set pressure at which the first and second plates are in contact with the first and second valve seats and a second set pressure at which the first and second plates are out of contact with the first and second valve seats.
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申请公布号 |
US5356113(A) |
申请公布日期 |
1994.10.18 |
申请号 |
US19930125187 |
申请日期 |
1993.09.23 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
MIZUISHI, KOJI;YOKOTA, KOUZOU;OGINO, KATSUHIKO |
分类号 |
F16K25/00;C30B15/00;F16K51/02;(IPC1-7):F16K3/16 |
主分类号 |
F16K25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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