发明名称 Method for evaluating interferograms and interferometer therefor
摘要 The invention relates to an evaluation method for interferograms and an interferometer corresponding thereto with which tile influence of coherent noise is reduced with simultaneously high interference contrast. Several phase maps are computed from interferograms which are recorded with coherent light. The interferogram components of the test object and the interferogram components of the coherent noise are displaced relative to each other in the camera plane between recording the interferograms. The influence of the coherent noise is suppressed by subsequently averaging the phase maps.
申请公布号 US5357341(A) 申请公布日期 1994.10.18
申请号 US19920912285 申请日期 1992.07.13
申请人 CARL-ZEISS-STIFTUNG 发明人 KUECHEL, MICHAEL;SCHUSTER, KARL-HEINZ;FREISCHLAD, KLAUS
分类号 G01B9/021;G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/021
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