| 摘要 |
<p>PURPOSE:To provide an electrostatic chuck having an excellent mechanical strength and a large attracting force, by forming the surface for attracting an object by an electrostatic action out of a plate-form body made of single crystal sapphire, and by making the leakage current of the electrostatic chuck very small. CONSTITUTION:In an electrostatic chuck, on the rear surface of a plate-form body 1 consisting of a single crystal of sapphire, an inner electrode 2 is provided, and the plate-form body 1 is fastened to a base plate 4 consisting of a single crystal of sapphire or one of various ceramics by a bonding agent 3 or by a high-temperature junction not using the bonding agent 3. Hereupon, the bonding agent 3 is an organic bonding agent, an inorganic agent, glass, metallization metal, or the like. In this manner, the insulator of the electrostatic chuck is a single crystal of sapphire, and it has a high insulating quality over the temperature range extending from the normal temperature to a high temperature of 800 deg.C, and moreover, it has a very small leakage current. Thereby, the electrostatic chuck never brings a wrong effect to the circuits laid on a silicon wafer.</p> |
