MANUFACTURE FOR SEMICONDUCTOR DEVICE,申请号JP19930077300-传众专利搜索

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发明名称	MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH06291194(A)	申请公布日期	1994.10.18
申请号	JP19930077300	申请日期	1993.04.05
申请人	NEC CORP	发明人	KATO HIROSHI
分类号	H01L21/28;C23C18/31;C25D5/02;C25D7/12;H01L21/288;H01L21/768;(IPC1-7):H01L21/90	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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