发明名称 DIE BONDING EQUIPMENT
摘要 PURPOSE:To provide a die bonding equipment capable of properly arranging a rectangular LED array chip with LED elements disposed at a high density on a substrate and capable of producing die bond. CONSTITUTION:A die bonding equipment 1 comprises two optical systems 20a and 20b for optically enlarging predetermined portions of a substrate 9 and an LED array chip 8, and a pattern recognition system 3 for recognizing the positions of the substrate 9 and LED array chip 8 from two images obtained from these optical systems 20 a and 20b and also for sending signals for determining the predetermined arrangement to the controller of an adjustment stage 10.
申请公布号 JPH06291155(A) 申请公布日期 1994.10.18
申请号 JP19930096647 申请日期 1993.03.31
申请人 VICTOR CO OF JAPAN LTD 发明人 NOZAWA HIROKI
分类号 H01L21/52;H01L33/08;H01L33/62 主分类号 H01L21/52
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