| 摘要 |
<p>PURPOSE:To provide a pressure sensor, a temperature sensor, and a temperature pressure sensor device with improved sensitivity, environmental resistance, and reliability. CONSTITUTION:An Si substrate 1 is formed partially and thinly as a support part 3, an emitter electrode 4 for releasing electrons and a gate electrode 5 are formed on a movable part 2 which is connected to the Si substrate 1 via the support part 3 and is displaced by pressure, and at the same time an anode electrode 6 which is an electron-absorbing part is formed on a thick part 9. Therefore, when the movable part 2 is displaced by pressure, the amount of released electrons 15 which are absorbed by the anode electrode 6 is reduced accordingly and output anode current is also reduced, thus measuring acceleration from the change rate.</p> |
