| 摘要 |
PURPOSE:To enable the directional control of the light in a short wavelength region with the optical circuit element for controlling the directivity of light by using surface acoustic waves. CONSTITUTION:An aluminum nitride layer 32 is formed on the surface of a substrate 31 and further an optical waveguide layer 33 is formed via or without via an intermediate layer on the surface thereof. A semiconductor laser chip 34 optically connected to this optical waveguide 33 is mounted thereon. The surface acoustic waves 37 are propagated to the aluminum nitride layer 32 by comb-shaped electrodes 36 but the propagation of the surface waves in the aluminum nitride is extremely high in speed. The light of the short wavelength region is, therefore, controlled in directivity by a deflecting and modulating part 33A even if the light in a short wave region is made incident on the optical waveguide layer 33. |
