| 摘要 |
PURPOSE:To manufacture a small-sized piezoelectric vibrator of high performance with high yield, without bonding and cutting. CONSTITUTION:A than plate type elastic body 10 formed of ceramics is heated, and ultrafine particles 12 for an intermediate electrode which are composed of platinum ultrafine particles are sprayed and deposited on the upper surface of the elastic body 10 from a spray nozzle 11, thereby forming a lower electrode 13. Ultrafine particles 15 for a piezoelectric body which are composed of PZT ultrafine particles are sprayed and deposited on the intermediate electrode 13 from a spray nozzle 14, thereby forming a thin film piezoelectric body 16, which is heat-treated in an oxygen atmosphere at 500-1000 deg.C. After that, ultrafine particles 18 for a surface electrode which are composed of platinum ultrafine particles are sprayed and deposited from a spray nozzle 17, thereby forming a surface electrode 19. Thus a piezoelectric vibrator wherein a piezoelectric element is laminated on the elastic body 20 is obtained. |
