| 摘要 |
<p>PURPOSE:To prevent the generation of troubles when the thickness of a piezoelectric film is not uniform. CONSTITUTION:A plurality of divided electrodes 12 are formed on the upper surface of a piezoelectric film 11, and a common electrode 13 is formed on the lower surface. In the case of electric field orientation at the time of manufacturing, each DC high voltage is applied across each of the divided electrodes 12 and the common electrode 13 which voltage is proportional to the average thickness of the piezoelectric film 11 between each of the electrodes 12 and the electrode 13. Thereby sufficient spontaneous polarization can be induced without generating dielectric breakdown in each part of the piezoelectric film 11 when the thickness of the piezoelectric film 11 is not uniform. At the time of driving, different voltages are applied across the respective divided electrodes 12 and the common electrode 13. Thereby the electric field applied to various parts of the piezoelectric film 11 can be made almost uniform, so that almost uniform piezoelectric constants can be exhibited all over the piezoelectric film 11 when the thickness of the film 11 is not uniform.</p> |
