EXPOSURE,申请号JP19930079211-传众专利搜索

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发明名称	EXPOSURE
摘要
申请公布号	JPH06291010(A)	申请公布日期	1994.10.18
申请号	JP19930079211	申请日期	1993.04.06
申请人	SHARP CORP	发明人	TSUJIMURA MASAHIRO;KAMIMURA HIRONORI
分类号	G03B27/02;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G03B27/02
代理机构		代理人
主权项
地址

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