摘要 |
PURPOSE:To obtain a mullite ceramic substrate having excellent adhesion to metallized particles but no warpage at all by specifying the content ratio between the mullite particles and a sintering agent as well as the composition of the latter. CONSTITUTION:A mullite ceramic substrate mainly comprising mullite is provided with an insulator containing Al2O3-SiO2-MgO base glass in 10-40wt.% while the glass composition comes within the range encircled by the four points of A, B, C, D in said glass composition figure. Within such a range, the weight% of Al2O3:SiO2:MgO is specified to be 40:58:2 at the point A, 42:43:15 at the point B, 60:23:17 at the point C and 58:38:4 at the point D. Through these procedures, the adhesion to the metallized particles can be enhanced while avoiding the warpage of the title mullite ceramic substrate by specifying the glass content as well as the composition ratio between Al2O3, SiO2 and MgO. |