| 摘要 |
PURPOSE:To prevent surely a wafer from being polluted through transfer by a carrier. CONSTITUTION:In a process managing apparatus for semiconductor processors, a first storing means 3 for storing the information on the work of each process and the information for identifying each semiconductor processor used in the work, a second storing means 5 for storing the clean-level information for a wafer which is obtained based on the work of each semiconductor processor, and a first controlling means 2 for managing various information stored in the first and second storing means 3, 5 are provided respectively. Further, in the apparatus, a second controlling means 6 and an outputting means 7 are provided respectively. By virtue of the second controlling means 6, the replacing work of the carrier for carrying the wafer is inserted in between required works of each process, according to the information about the flow of wafers in the semiconductor processors and about the clean level of wafers based on the work of each semiconductor processor. The outputting means 7 generates its output in response to the work performed by each semiconductor processor in each process. |
