| 摘要 |
PURPOSE:To accurately detect treating liquid irrespective of properties of liquid. CONSTITUTION:Leakage liquid detecting sensors 48, 49 detect leakage of treating liquid, and have liquid receivers 53, 58, light introducing units 54, 59 and light emitting units 55, 60. The receivers 53, 58 can contain the liquids and reflects a light emitted due to a difference of refractive indexes in a treating liquid non-containing state. The units 54, 59 introduce lights to the receivers 53, 59. The units 55, 60 emit reflected lights from the receivers 53, 58. In this case, since the difference of the refractive indexes is reduced when the liquids are contained in the receivers 53, 58, the light is not reflected on the receivers 53, 58 to detect liquid leakage. |
