| 摘要 |
PCT No. PCT/EP92/00367 Sec. 371 Date Sep. 1, 1993 Sec. 102(e) Date Sep. 1, 1993 PCT Filed Feb. 21, 1992.The invention relates to a system for supplying inert gas to a multi-stage, dry-running vacuum pump (1) with systems for distributing the inert gas to the pump stages. To be able to monitor the flow of the inert gas and/or influence the rate of flow, a modularly constructed apparatus (36) with inert gas inlet, inert gas outlets and inert gas conduits is proposed, which is equipped with monitoring components.
|
