发明名称 MANUFACTURING METHOD & STRUCTURE OF SEMICONDUCTOR MEMORY DEVICE
摘要 The semiconductor memory device includes a semiconductor substrate on which active and isolation regions are formed, a trench-type capacitor formed in the substrate and adjacent to the interface of the active region and isolation region, a gate formed on a predetermined portion of the substrate, a trench formed on a region corresponding to a portion between the gate and isolation region, an oxide layer being formed under the trench, the trench being filled with conductive material, the conductive material being connected to the trench-type capacitor, a stacked capacitor whose storage node is connected to the trench, thereby increasing the capacitance.
申请公布号 KR940009613(B1) 申请公布日期 1994.10.15
申请号 KR19910015424 申请日期 1991.09.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NAM, IN - HO;HWANG, CHANG - KYU
分类号 H01L27/108;(IPC1-7):H01L27/108 主分类号 H01L27/108
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