发明名称 MANUFACTURING METHOD OF ROM
摘要 The method includes the steps of forming an insulating layer and conductive layer on a substrate, forming an n-type polysilicon layer on the conductive layer, patterning the polysilicon layer to define a ROM cell region, forming a polysilicon layer to cover the conductive layer and n-type polysilicon layer, forming a conductor on the ROM cell region, ion-implanting p-type impurities into the ROM cell region.
申请公布号 KR940009643(B1) 申请公布日期 1994.10.15
申请号 KR19910020279 申请日期 1991.11.14
申请人 GOLDSTAR ELECTRON CO., LTD. 发明人 PARK, SONG - HWI
分类号 H01L27/115;(IPC1-7):H01L27/115 主分类号 H01L27/115
代理机构 代理人
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