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发明名称
DREHBARER MECHANISMUS ALS SUBSTRATTRÄGER MIT VORRICHTUNG FÜR TEMPERATURMESSUNG UND BESTIMMT FÜR CHEMISCHE BEDAMPFUNGSEINRICHTUNGEN.
摘要
申请公布号
AT112533(T)
申请公布日期
1994.10.15
申请号
AT19880904757T
申请日期
1988.03.30
申请人
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC.
发明人
DE BOER, WIEBE;OZIAS, ALBERT, E.
分类号
C23C16/44;B05C11/08;C23C16/455;C23C16/458;C23C16/46;H01L21/00;H01L21/205;H01L21/31;H01L21/68;H01L21/687;(IPC1-7):B65G11/00;B05C11/00;C23C14/50;C23C16/52;C30B25/12
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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