发明名称 HIGH-VOLTAGE, VERTICAL-TRENCH SEMICONDUCTOR DEVICE
摘要 <p>An optically-triggered silicon controlled rectifier (SCR) (21) having a number of semiconductor layers (23, 24, 31) diffused into an N type substrate (22). Specifically, the SCR is formed by diffusing a first P+ layer (23) into an upper surface of the substrate. Then, an N+ layer (24) is diffused into a portion of an upper surface of the first P+ layer. An oxide layer (25) which is permeable to optical radiation is formed on the first P+ layer. A conductive cathode terminal (26) is then deposited on the N+ layer. Therefore, a trench (30) is etched in the lower surface of the substrate. The trench is defined by a depth and a surface. A second P+ layer (31) is diffused into the surface of the trench. The depth of the trench substantially defines the distance between first and second P+ layers. The chip is soldered into a pedestal (33) formed on a lead frame (34). The solder is deposited in the trench and contacts the second P+ layer to form an anode terminal (36). The pedestal may be formed by either etching or stamping a depression (35) in the lead frame. By using the trench to define the distance between first and second P+ layers, a thicker substrate can be used and therefore a larger wafer.</p>
申请公布号 WO1994023455(A1) 申请公布日期 1994.10.13
申请号 US1994003556 申请日期 1994.03.31
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