发明名称 PROCESS FOR MANUFACTURING AN ACTIVE MATRIX DISPLAY
摘要 Disclosed is an improved method for fabricating an active matrix liquid crystal display device having enhanced pixel capacitance for improved display performance. The improved method provides for the use of fewer mask and etch steps, thus simplifying the manufacturing process. The inventive method also provides for protecting the channel region (40) of the thin film transistor switch at each picture element (38) from the harsh processing environment.
申请公布号 WO9423446(A1) 申请公布日期 1994.10.13
申请号 WO1993US03854 申请日期 1993.04.26
申请人 ADVANCED TECHNOLOGY INCUBATOR, INC.;BRINKENSTEIN, MIKI;GLUCK, JOACHIM;LUDER, ERNST 发明人 BRINKENSTEIN, MIKI;GLUCK, JOACHIM;LUDER, ERNST
分类号 H01L21/77;H01L21/84;(IPC1-7):H01L21/336;H01L29/784 主分类号 H01L21/77
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