DEVICE FOR PRODUCING A PLASMA POLYMER PROTECTION LAYER ON WORKPIECES, IN PARTICULAR HEADLAMP REFLECTORS

摘要

A device for producing a plasma polymer protective layer on workpieces, in particular headlamp reflectors (10), has a coating chamber (18) into which a polymerisable monomer may be introduced and in which microwaves generate in the area of the magnetic field of permanent magnets a plasma for depositing the polymer protection layer on workpieces held on workpiece carriers (11). The permanent magnets are arranged on the workpiece carriers (11). In addition, a transport device (12) which conveys the workpiece carriers (11) through the coating chamber (18) has a return section for the workpiece carriers (11) with a cleaning station (22) located outside the coating chamber (18) for returning the workpiece carriers (11) from the exit to the entrance of the coating chamber (18). The known ECR coating process can thus be implemented in an in line process as the magnets are continuously cleaned.