Method and apparatus for wafer transfer.,申请号EP19900106699-传众专利搜索

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发明名称	Method and apparatus for wafer transfer.
摘要
申请公布号	EP0392399(B1)	申请公布日期	1994.10.12
申请号	EP19900106699	申请日期	1990.04.06
申请人	APPLIED MATERIALS, INC.	发明人	COLLINS, KENNETH S.
分类号	B65H3/18;B65H5/00;H01L21/677;H01L21/683;H01L21/687;H02N13/00;(IPC1-7):H01L21/00	主分类号	B65H3/18
代理机构		代理人
主权项
地址

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