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摘要
申请公布号
JPH0680802(B2)
申请公布日期
1994.10.12
申请号
JP19870234135
申请日期
1987.09.18
申请人
SUMITOMO ELECTRIC INDUSTRIES
发明人
SHIGA NOBUO
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/095;H01L29/80;(IPC1-7):H01L27/095
主分类号
H01L21/822
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