发明名称
摘要 PURPOSE:To enable the inspection at a high accuracy and at a high speed, by placing objects to be inspected separately on small turntables so as to be arranged within an effective view of X rays when numerous small objects being inspected are inspected simultaneously. CONSTITUTION:An X ray fan beam 2 from one X rays source 1 is divided into several beams and a turntable 4 and a detector 5 are provided for each of fan beams divided. Therefore, one CT apparatus is built corresponding to each angle alpha1 of the X ray fan beam, enabling the arranging of as many CT apparatuses as the number of divisions for one X rays source 1. This allows smaller pixel dimensions with a smaller effective view thereby producing a highly accurate image.
申请公布号 JPH0680420(B2) 申请公布日期 1994.10.12
申请号 JP19850208086 申请日期 1985.09.20
申请人 HITACHI LTD 发明人 ITO SHINICHI
分类号 H01L21/66;A61B6/03;G01N23/04 主分类号 H01L21/66
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