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发明名称
CONTAINER OF EVAPORATING SOURCE FOR FORMING THIN FILM
摘要
申请公布号
JPH06287748(A)
申请公布日期
1994.10.11
申请号
JP19930096550
申请日期
1993.04.01
申请人
NIKON CORP
发明人
ITAGAKI SHIGEO
分类号
C23C14/24;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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