PREPARATION OF SUPERCONDUCTING OXIDE FILMS USING A PRE-OXYGEN NITROGEN ANNEAL

摘要

This invention is directed to a method of preparing a superconducting metal oxide film on a substrate. More particularly, the method comprises depositing a superconducting metal oxide precursor film on the substrate and then subjecting it to annealing in a nitrogen atmosphere followed by annealing in an oxygen atmosphere, followed by rapid cooling, according to schedule wherein the time and temperature are critically defined.