摘要 |
PURPOSE:To improve adhesion at an interface between a base member and a coating film without impairing an affinity between the coating film and an osseous tissue by providing a calcium phosphate coating film by means of ion beam dynamic mixing which uses ion implantation together with vacuum deposition. CONSTITUTION:In a vacuum vessel 1, a base plate holder 3 for holding a base plate 2 to be coating-processed and an evaporation source hearth 4 are arranged and a hydroxyapatite (HAp) sintered body 5 to be evaporated is placed in the evaporation source hearth 4. A gas introduction nozzle 6 is provided facing the upper part of the evaporation source hearth 4 and an ion source and an ion accelerator 7 are consecutively provided in the vacuum chamber 1. The HAp in the evaporation source hearth 4 is heated and evaporated in H2O atmosphere to deposit evaporated particles onto a titanium base plate and, at the same time, calcium ions are implanted into the titanium base plate from the ion source and the ion accelerator 7. Since an intermediate layer is, thereby, generated on an interface between a base member and a coating layer, adhesion is improved. |