METHOD FOR PRODUCING THIN FILM OF OXIDE SUPERCONDUCTOR

摘要

: A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen or oxygen ions and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.