VACUUM FILM FORMATION AND ITS APPARATUS,申请号JP19940010783-传众专利搜索

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发明名称	VACUUM FILM FORMATION AND ITS APPARATUS
摘要
申请公布号	JPH06287754(A)	申请公布日期	1994.10.11
申请号	JP19940010783	申请日期	1994.02.02
申请人	TOSHIBA CORP	发明人	HIRATA NORIYUKI
分类号	C23C14/50;C23C16/42;(IPC1-7):C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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